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Updated: Jun 27, 2026

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
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Fully flexible large-area MEMS-based triaxial force sensor compatible with flat panel display manufacturing.

Gianluca Massimino1, Samer Houri2, Alexey Podkovskiy2

  • 1imec, Kapeldreef 75, 3001, Leuven, Belgium. gianluca.massimino@outlook.com.

Microsystems & Nanoengineering
|June 25, 2026
PubMed
Summary

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This study introduces a flexible, large-area triaxial force sensor using Micro-Electro-Mechanical-Systems (MEMS) technology compatible with Flat Panel Display (FPD) manufacturing. This novel MEMS sensor offers high sensitivity for pressure and shear forces, enabling cost-effective batch production.

Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Electrical Engineering

Background:

  • Flexible sensor technologies often rely on ad-hoc fabrication processes, limiting scalability and large-area applications.
  • Existing capacitive triaxial force sensors face challenges in large-scale manufacturing and integration.

Purpose of the Study:

  • To develop a fully flexible, large-area triaxial force sensor using Micro-Electro-Mechanical-Systems (MEMS) technology.
  • To ensure compatibility with standard Flat Panel Display (FPD) production processes for cost-effective batch manufacturing.
  • To characterize the sensor's response to pressure and shear loads, including the effects of residual stresses.

Main Methods:

  • Utilized standard surface micromachining for fabrication, ensuring compatibility with Flat Panel Display (FPD) production.

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  • Characterized sensor response in both mechanical and electrical domains under applied pressure and shear loads.
  • Employed a 3D Finite Element Method (FEM) model to simulate sensor behavior and optimize design.

    • Main Results:

    • Achieved normalized pressure sensitivity of 0.0013 kPa⁻¹ and shear sensitivity of 2.6 × 10⁻³ kPa⁻¹.
    • Demonstrated higher sensitivity compared to state-of-the-art capacitive triaxial force sensors.
    • Validated the sensor's potential for scalable array designs, with predicted capacitance of 640 pF per element in a 29x29 array.

    Conclusions:

    • Developed a novel, highly sensitive flexible triaxial force sensor technology.
    • The MEMS-based sensor is compatible with cost-effective, large-area Flat Panel Display (FPD) batch production.
    • The sensor's design and performance characteristics offer significant advancements for flexible force sensing applications.