Efficient Mapping and Tracking the Properties of Micromechanical Resonators Using Phase-Lock Loops with

Agnes Zinth1,2,3, Samer Houri4, Menno Poot1,3,5

  • 1Department of Physics, TUM School of Natural Sciences, Technical University of Munich, D-85748 Garching, Germany.

Micromachines
|February 27, 2026
PubMed
Summary

This study presents a new method for tracking mechanical properties of micro- and nano-mechanical systems (MEMS and NEMS) using three drive frequencies and phase-locked loops. This efficient technique enables rapid monitoring of resonator dynamics without frequency sweeps.

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