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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Optical phased array with on-chip phase calibration.

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    This study presents an on-chip phase calibration system for optical phased arrays (OPAs). This integrated system enables accurate beam steering and arbitrary pattern generation with high fidelity and low complexity.

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    Area of Science:

    • Photonics
    • Integrated Optics
    • Beamforming Technology

    Background:

    • Robust beamforming in optical phased arrays (OPAs) requires precise phase monitoring and control.
    • Existing calibration methods can be complex and computationally intensive.

    Purpose of the Study:

    • To demonstrate an on-chip integrated phase calibration system for high-fidelity beam steering in OPAs.
    • To enable linear complexity calibration and arbitrary optical beam generation.

    Main Methods:

    • Fabrication of a 32-channel OPA with a 2.5-µm pitch using an Si-SiN photonic stack.
    • Integration of compact phase interrogator structures and silicon photon-assisted tunneling detectors (PATDs) for readout.
    • Implementation of a model-based calibration procedure for phase-error correction.

    Main Results:

    • Achieved high-fidelity beam steering with a sidelobe suppression ratio (SLSR) of -11 dB.
    • Demonstrated a beam divergence of 0.97° × 0.58° at a 1.55-µm wavelength.
    • Successfully performed wavelength-dependent calibration for full 2D beam steering and arbitrary pattern generation.

    Conclusions:

    • The developed on-chip calibration system significantly enhances OPA performance for beamforming applications.
    • The integrated approach offers a low-complexity solution for accurate phase control and versatile beam generation.
    • The use of PATDs allows for sub-bandgap light detection without additional fabrication steps.