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Updated: Jul 29, 2025

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Infrared sensitive mixed phase of V7O16 and V2O5 thin-films
Anchal Rana1, Aditya Yadav2, Govind Gupta2
1Centre for Advanced Materials and Devices, School of Engineering and Technology, BML Munjal University Sidhrawali Gurugram-122413 Haryana India rana.abhimanyu@gmail.com.
We developed infrared-sensitive vanadium oxide films using cathodic vacuum arc-deposition. These mixed V7O16 and V2O5 films show tunable properties with annealing, offering potential for optical applications.
Area of Science:
- Materials Science
- Thin Film Technology
- Semiconductor Physics
Background:
- Vanadium oxides (V_xO_y) exhibit diverse electrical and optical properties.
- Controlling the phase and defect chemistry is crucial for tailoring their functionality.
- Low-temperature deposition methods are desirable for flexible substrate compatibility.
Purpose of the Study:
- To investigate the formation and properties of mixed V7O16 and V2O5 thin films.
- To understand the influence of annealing temperature on phase composition and material characteristics.
- To elucidate the mechanisms behind the infrared sensitivity and optical-electrical property correlations.
Main Methods:
- Cathodic vacuum arc-deposition for thin film growth.
- Post-annealing treatments at various temperatures (300-450 °C).
- Raman spectroscopy, optical transmission, photoluminescence (PL), and time-resolved photoluminescence (TRPL) measurements.
Main Results:
- Stabilization of a mixed V7O16 and V2O5 phase achieved via post-annealing between 300-400 °C.
- Complete conversion to V2O5 observed at higher annealing temperatures (~450 °C).
- Increased V2O5 content correlated with higher optical transmission, lower electrical conductivity, and reduced optical bandgap.
- Defect roles (oxygen vacancies) identified through PL and TRPL, explaining property variations.
- Infrared sensitivity attributed to plasmonic absorption in the V7O16 degenerate semiconductor phase.
Conclusions:
- Mixed V7O16 and V2O5 thin films can be controllably synthesized at low temperatures.
- Annealing provides a route to tune the phase composition and optical-electrical properties.
- The observed IR sensitivity is linked to the plasmonic behavior of the V7O16 phase, suggesting potential for IR detector applications.
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