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Solution-processed zirconium acetylacetonate charge-trap layer for multi-bit nonvolatile thin-film memory transistors
Song Lee1, Jeong-In Lee1, Chang-Hyun Kim2
1Department of Creative Convergence Engineering, Hanbat National University, Daejeon, South Korea.
Science and Technology of Advanced Materials
|May 26, 2023
Summary
Solution-processed zirconium acetylacetonate (ZAA) demonstrates excellent charge trap properties for nonvolatile memory transistors. Low-temperature processed ZAA exhibits superior multi-bit memory performance, ideal for flexible electronics.
Area of Science:
- Materials Science
- Electronics Engineering
- Nanotechnology
Background:
- Nonvolatile charge-trap memory (CTM) transistors are crucial for advanced electronic devices.
- Solution-processed materials offer cost-effective fabrication routes for CTMs.
- Zirconium acetylacetonate (ZAA) is explored as a charge trapping layer (CTL) material.
Purpose of the Study:
- To investigate the charge trap properties of solution-processed ZAA for CTM applications.
- To evaluate the effect of annealing temperature on ZAA's performance in CTMs.
- To compare the memory characteristics of organic-based and oxide-based CTMs utilizing ZAA.
Main Methods:
- Fabrication of p-type organic-based and n-type oxide-based CTMs using solution-processed ZAA as the CTL.
- Varying the annealing temperature of ZAA from room temperature (RT) to 300°C.
- Characterization of memory performance, including threshold voltage shift (ΔVTH), multi-bit operation, memory retention, and on/off current ratios.
- Utilizing simulated electrical potential contour maps to explain device behavior.
Main Results:
- RT-dried ZAA in p-type CTMs yielded a significant ΔVTH (≈ 80 V), four distinct VTHs for multi-bit operation, and high memory on/off ratio (≈ 5x10^4).
- RT-dried ZAA in n-type Ox-CTMs showed a ΔVTH of 14 V and a memory on/off ratio of ≈ 10^4, with good retention.
- Simulations explained the lack of electrical erasability in Ox-CTMs.
- The RT-dried organic ZAA CTL demonstrated the best memory functionality among the fabricated CTMs.
Conclusions:
- The charge trap properties of solution-processed ZAA are highly dependent on annealing temperature, with low-temperature processing being optimal.
- High carbon double bond content in low-temperature processed ZAA is beneficial for multi-bit CTM performance.
- RT-dried organic ZAA CTLs are promising for developing low-cost, high-performance multi-bit CTMs for flexible electronics.

