Related Experiment Video
Updated: Jul 29, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Static and Eigenvalue Analysis of Electrostatically Coupled and Tunable Shallow Micro-Arches for Sensing-Based
Hassen M Ouakad1,2, Ayman M Alneamy3
1Mediterranean Institute of Technology, South Mediterranean University, Tunis 1053, Tunisia.
Abstract:
This paper investigated the mechanical performance of an electrostatically tunable microbeams-based resonators. The resonator was designed based on two initially-curved microbeams that are electrostatically coupled, offering the potential for improved performance compared to single-beam based resonators. Analytical models and simulation tools were developed to optimize the resonator design dimensions and to predict its performance, including its fundamental frequency and motional characteristics. The results show that the electrostatically-coupled resonator exhibits multiple nonlinear phenomena including mode veering and snap-through motion. A coexistence of two stable branches of solutions for a straight beam case was even obtained due to the direct effect of the coupling electrostatic force with the other curved beam. Indeed, the results are promising for the better performance of coupled resonators compared to single-beam resonators and offer a platform for future MEMS applications including mode-localized based micro-sensors.
Related Concept Videos
Electrostatic Boundary Conditions in Dielectrics
Consider a case where both the mediums across a boundary are two different dielectric materials. Recall that the electric field and electric displacement are proportional and related through the material's...
Electrostatic Boundary Conditions
The surface integral of an electric field is given by Gauss's law in integral form and is related to...
Induced Electric Fields: Applications
Biasing of Metal-Semiconductor Junctions
In Schottky junctions, where the semiconductor is n-type, applying a positive voltage to the metal relative to the semiconductor reduces its Fermi...

