Static and Eigenvalue Analysis of Electrostatically Coupled and Tunable Shallow Micro-Arches for Sensing-Based

Hassen M Ouakad1,2, Ayman M Alneamy3

  • 1Mediterranean Institute of Technology, South Mediterranean University, Tunis 1053, Tunisia.

Micromachines
|May 27, 2023
PubMed
Summary

This study explores electrostatically tunable micro-resonators with coupled beams. Coupled resonators show enhanced performance and nonlinear behaviors, promising for micro-electromechanical systems (MEMS) applications.

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