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A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of

Jingsong Chen1,2,3,4, Zhou Lan1,2,3,4, Cheng Xue1,2,3,4

  • 1National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.

Micromachines
|May 27, 2023
PubMed

Keywords:
rotary scanning edge detectionthe least squares fitting of circles methodwafer pre-alignmentweighted Fourier series fitting of circles method

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