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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Editorial for Special Issue "Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and
1Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, 01277 Dresden, Germany.
Micromachines
|May 27, 2023
Abstract:
The enhanced piezoelectric properties of aluminum scandium nitride (Al1-xScxN or AlScN) were discovered in 2009 by Morito Akiyama's team [...].

