Engineering Porous Silicon-Based Microcavity for Chemical Sensing

In this article, the authors theoretically and experimentally investigated ways to improve the efficiency of porous silicon (PS)-based optical microcavity sensors as a 1D/2D host matrix for electronic tongue/nose systems. The transfer matrix method was used to compute reflectance spectra of structures with different [n_Ln_H] sets of low n_L and high n_H bilayer refractive indexes, the cavity position λ_c, and the number of bilayers N_bi. Sensor structures were prepared by electrochemically etching a silicon wafer. The kinetics of adsorption/desorption processes of ethanol-water-based solution was monitored in real time with a reflectivity probe-based setup. It was theoretically and experimentally demonstrated that the sensitivity of the microcavity sensor is higher for structures with refractive indexes in the lower range (and the corresponding porosity values in the upper range). The sensitivity is also improved for structures with the optical cavity mode (λ_c) adjusted toward longer wavelengths. The sensitivity of a distributed Bragg reflector (DBR) with cavity increases for a structure with cavity position λ_c in the long wavelength region. The full width at half maximum (fwhm_c) of the microcavity is smaller and the quality factor of microcavity (Q_c) is higher for the DBR with a larger number of structure layers N_bi. The experimental results are in good agreement with the simulated data. We believe that our results can help in developing rapid, sensitive, and reversible electronic tongue/nose sensing devices based on a PS host matrix.