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This study introduces an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method for accurate phase extraction from single interferograms. APLEF demonstrates superior performance compared to existing methods in optical metrology applications.

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Area of Science:

  • Optical Metrology
  • Image Processing

Background:

  • Phase extraction from single interferograms is crucial in optical metrology.
  • Existing methods face limitations in accuracy and applicability.

Purpose of the Study:

  • To propose and validate an advanced Pixel-level Lissajous Ellipse Fitting (APLEF) method.
  • To enable accurate phase extraction from single interferograms without a carrier.

Main Methods:

  • Developed an APLEF method utilizing Lissajous figures generated at each pixel.
  • Constructed Lissajous figures by plotting intensity differences (N) and sums (D) of adjacent pixels.
  • Ensured phase quadrature and closed figures by incorporating opposite intensity values (-N, -D).

Main Results:

  • Simulations indicated higher accuracy for APLEF compared to Spatial Phase Tapping (SPT) and Garbusi's method.
  • Experimental validation confirmed the effectiveness of the APLEF method.

Conclusions:

  • The APLEF method provides a robust and accurate solution for single interferogram phase extraction.
  • This technique advances capabilities in optical metrology and phase demodulation.