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Updated: Jul 26, 2025

Cryo-electron Microscopy Specimen Preparation By Means Of a Focused Ion Beam
Published on: July 26, 2014
Ion-beam deposited platinum as electrical contacting material in operando electron microscopy experiments at elevated
Søren Bredmose Simonsen1, Zhongtao Ma1, Elisabeth Mariegaard1
1DTU Energy, Kgs. Lyngby, Denmark.
Abstract:
Establishing a stable and well conducting contacting material is critical for operando electron microscopy experiments of electrical and electrochemical devices at elevated temperatures. In this contribution, the nanostructure and electrical conductivity of ion beam deposited Pt are investigated both in vacuum and in oxygen as a function of temperature. Its microstructure is relatively stable up to a temperature of approx. 800°C and up to an applied current density of approx. 100 kA/cm2 . Its conductivity increases with temperature, attributed to densification, with changes in the hydrocarbon matrix being less important. Recommendations are provided with respect to the Pt deposition parameters in terms of maximizing stability and minimizing electrical resistance. RESEARCH HIGHLIGHTS: It is feasible to use ion beam deposited Pt as electrical contacting material in operando electron microscopy. The deposited Pt is relatively stable up to 800°C and approx. 100 kA/cm2 . The resistivity can be reduced by increasing the applied ion current during deposition and by thermal annealing at a temperature of 500°C in a few mbar of oxygen.
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