Related Experiment Video
Updated: Jul 25, 2025

08:17
Free-form Light Actuators — Fabrication and Control of Actuation in Microscopic Scale
Published on: May 25, 2016
9.3K
Laser Interference Lithography-A Method for the Fabrication of Controlled Periodic Structures
Ri Liu1,2,3, Liang Cao1,2,3, Dongdong Liu1,2,3
1International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, China.
Nanomaterials (Basel, Switzerland)
|June 27, 2023
Summary
Laser interference lithography (LIL) fabricates precise periodic surface structures for advanced functionalities. This review explores LIL principles, parameter control, and diverse applications in materials science.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Engineering
Background:
- Microstructures dictate macro-scale surface properties and functionalities.
- Controlled periodic structures enable applications like structural color, wettability control, and enhanced hardness.
- Laser interference lithography (LIL) offers maskless, rapid fabrication of high-resolution periodic structures over large areas.
Purpose of the Study:
- To review the fundamental principles of Laser Interference Lithography (LIL).
- To discuss the influence of key parameters on interference light field generation.
- To present a comprehensive overview of LIL's applications in functional surface fabrication.
Main Methods:
- Utilizing LIL to create various periodic structures (nanoparticles, dots, holes, stripes) on diverse substrates.
- Controlling interference conditions through parameters like spatial angle, incidence angle, wavelength, and polarization.
- Leveraging LIL's large depth of focus for application on curved substrates.
Main Results:
- Demonstration of LIL's versatility in producing a wide range of periodic nanostructures.
- Identification of key parameters influencing the resulting interference light field and fabricated structures.
- Successful application of LIL for surfaces with anti-reflection, structural color, SERS, and superhydrophobicity.
Conclusions:
- LIL is a powerful technique for fabricating functional periodic surfaces with tunable properties.
- Understanding parameter control is crucial for optimizing LIL processes and applications.
- Further research is needed to address current challenges and expand LIL's potential in advanced manufacturing.

