Laser Interference Lithography-A Method for the Fabrication of Controlled Periodic Structures

Ri Liu1,2,3, Liang Cao1,2,3, Dongdong Liu1,2,3

  • 1International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, China.

Summary

Laser interference lithography (LIL) fabricates precise periodic surface structures for advanced functionalities. This review explores LIL principles, parameter control, and diverse applications in materials science.