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Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
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Comparative Study of Thermal and Plasma-Enhanced Atomic Layer Deposition of Iron Oxide Using

Boyun Choi1, Gun-Woo Park1, Jong-Ryul Jeong1

  • 1Department of Materials Science and Engineering, Chungnam National University, Daejeon 34134, Republic of Korea.

Nanomaterials (Basel, Switzerland)
|June 27, 2023
PubMed

Keywords:
bis(N,N′-di-butylacetamidinato)iron(II) (FeAMD)hematitehigh aspect ratioiron oxidesplasma-enhanced atomic layer depositionthermal atomic layer depositiontrench structures

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