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Updated: Jul 25, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Mechanical Response of MEMS Suspended Inductors under Shock Using the Transfer Matrix Method

Tianxiang Zheng1, Lixin Xu1

  • 1School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China.

Micromachines
|June 28, 2023
PubMed

Keywords:
MEMS suspended inductorsdynamic responseshock loadtransfer matrix method

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