A Miniaturized Piezo Stack Impact Actuation Mechanism for Out-of-Plane Freely Moveable Masses

Matthias C Wapler1, Constantin Peter2, Koustav Kanjilal2

  • 1Laboratory for Microsystems Engineering for Medical Engineering, Faculty of Electrical Engineering and Information Technology, Otto-von-Guericke University Magdeburg, 39122 Magdeburg, Germany.

Micromachines
|June 28, 2023
PubMed

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