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Updated: Jul 25, 2025

08:32
Development of Whispering Gallery Mode Polymeric Micro-optical Electric Field Sensors
Published on: January 29, 2013
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Stadium-type resonator sensor based on a multi-mode waveguide with mode discrimination phenomenon
Optics Express
|June 29, 2023
Summary
This study introduces a high-performance SU-8 polymer multi-mode resonator sensor. Despite sidewall roughness, it achieves excellent mode discrimination and high sensitivity, making it competitive with single-mode sensors.
Area of Science:
- Photonics and sensing technologies
- Materials science of polymers
Background:
- Multi-mode resonators offer potential for sensing applications.
- Sidewall roughness in SU-8 polymer fabrication is typically considered a defect.
Purpose of the Study:
- To investigate the performance of an SU-8 polymer multi-mode resonator as a high-performance sensor.
- To analyze the impact of sidewall roughness on resonator performance and mode discrimination.
Main Methods:
- Fabrication of SU-8 polymer multi-mode resonators.
- Analysis of sidewall roughness using field emission scanning electron microscopy (FE-SEM).
- Numerical simulation of resonator performance with varying sidewall roughness.
- Experimental verification through temperature variation for sensing capabilities.
Main Results:
- Mode discrimination was achieved and maintained despite the presence of sidewall roughness.
- UV exposure time effectively controlled waveguide width, enhancing mode discrimination.
- The resonator sensor demonstrated high sensitivity (approx. 630.8 nm/RIU) in temperature variation experiments.
Conclusions:
- SU-8 polymer multi-mode resonators can function as high-performance sensors.
- Sidewall roughness does not preclude effective mode discrimination and sensing.
- The fabricated sensor is a cost-effective and competitive alternative to single-mode waveguide sensors.
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