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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Compact structured light generation based on meta-hologram PCSEL integration.

Wen-Cheng Hsu^1,2, Chia-Hsun Chang¹, Yu-Heng Hong³

¹Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.

|June 29, 2023

Summary

This summary is machine-generated.

This study demonstrates compact holographic image reconstruction using a photonic crystal surface-emitting laser and metasurface holograms. This integration offers high output power and wide field-of-view imaging for 3D applications without extra lenses.

Keywords:

Hologram Metasurfaces Photonic crystal surface-emitting laser Structured light

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Area of Science:

Optics and Photonics
Metasurface Technology
Laser Engineering

Background:

Metasurfaces offer novel optical functions but integration with Vertical Cavity Surface-Emitting Lasers (VCSELs) faced limitations.
Previous VCSEL integrations suffered from low output power and large divergence angles.
VCSEL arrays, while improving power, required extra lenses and were bulky.

Purpose of the Study:

To experimentally demonstrate holographic image reconstruction using a novel compact integration.
To overcome the limitations of previous VCSEL-metasurface integrations.
To showcase metasurfaces' flexible design for structured light generation and high-performance imaging.

Main Methods:

Integration of a photonic crystal surface-emitting laser with custom-designed metasurface holograms.
Design of metasurfaces for structured light generation and holographic image reconstruction.
Experimental setup for demonstrating holographic imaging capabilities.

Main Results:

Successful reconstruction of holographic images.
Achieved high output power on the order of milliwatts.
Demonstrated well-uniformed images with a wide field of view.
Eliminated the need for a collection lens.

Conclusions:

The compact integration of photonic crystal lasers and metasurfaces enables high-performance holographic imaging.
This approach overcomes previous limitations, offering high power and a wide field of view.
The technology is suitable for advanced 3D imaging and sensing applications.