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The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope
J Fu1, M C Croarkin1, T V Vorburger1
1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.
Summary
Standard Reference Material 484 (SRM-484) is crucial for calibrating Scanning Electron Microscope (SEM) magnification. This publication details the methods and uncertainty for SRM-484, using data from its later versions.
Area of Science:
- Materials Science
- Metrology
- Instrumentation Science
Background:
- Standard Reference Material 484 (SRM-484) has been a key artifact for Scanning Electron Microscope (SEM) calibration since 1977.
- Seven iterations of SRM-484 (SRM-484 to SRM-484f) were certified between 1977 and 1992.
- Accurate SEM magnification calibration is essential for reliable nanoscale measurements.
Purpose of the Study:
- To document the instrumentation and measurement procedures used for SRM-484.
- To detail the methodology for determining the uncertainty associated with SRM-484 calibration.
- To provide illustrative data from recent SRM-484 issues (484e and 484f).
Main Methods:
- Utilized specific instrumentation for high-resolution imaging and dimensional metrology.
- Implemented precise measurement protocols to assess the artifact's certified features.
- Employed established statistical methods for uncertainty quantification.
Main Results:
- Detailed characterization of SRM-484, confirming its suitability for SEM magnification calibration.
- Established uncertainty budgets for the certified magnification scale.
- Presented data demonstrating the consistency and reliability of SRM-484 issues 484e and 484f.
Conclusions:
- SRM-484 provides a reliable standard for SEM magnification calibration within the 1000 × to 20000 × range.
- The documented procedures ensure the integrity and traceability of SRM-484 certifications.
- This work supports the continued accurate use of SEMs in scientific research and industry.
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