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Updated: Jul 24, 2025

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The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope

J Fu1, M C Croarkin1, T V Vorburger1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.

Journal of Research of the National Institute of Standards and Technology
|July 5, 2023
PubMed

Keywords:
SRMinterferometerprecisionrandom errorsystematic erroruncertainty

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