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What MEMS Research and Development Can Learn from a Production Environment
Malte Florian Niekiel1, Jana Marie Meyer1, Hanna Lewitz2
1Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany.
Sensors (Basel, Switzerland)
|July 8, 2023
Summary
Adapting industrial fabrication methods can accelerate microelectromechanical systems (MEMS) research. Shifting focus from device fabrication to process development is key for efficient MEMS research and production.
Area of Science:
- Materials Science
- Engineering
- Nanotechnology
Background:
- Microelectromechanical systems (MEMS) development faces challenges due to the complex interplay between device design and fabrication processes.
- Industry employs various tools and methods for efficient MEMS volume production, but academic research hesitantly adopts them.
Purpose of the Study:
- To investigate the applicability of industry-derived tools and methods in research-focused MEMS development.
- To demonstrate the benefits of adapting production methodologies within academic research settings.
Main Methods:
- Literature review and perspective analysis of industry best practices in MEMS fabrication.
- Case study illustrating the application of these methods in developing magnetoelectric MEMS sensors.
Main Results:
- Adapting volume production tools and methods is beneficial even in research environments.
- A shift in perspective towards process development, rather than just device fabrication, is crucial for progress.
Conclusions:
- Academic MEMS research can significantly benefit from adopting industry production methodologies.
- This approach facilitates efficient development, maintenance, and advancement of fabrication processes for MEMS devices.
