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High-Temperature Fiber-Optic Fabry-Perot Vibration Sensor Based on Single-Crystal Sapphire
Hua Liu1, Pinggang Jia1, Chengxin Su1
1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Sensors (Basel, Switzerland)
|July 11, 2023
Summary
A novel fiber-optic Fabry-Perot (F-P) vibration sensor demonstrates reliable performance up to 800 °C. This high-temperature sensor exhibits excellent sensitivity and minimal nonlinearity, promising wide engineering applications.
Area of Science:
- Optical Engineering
- Materials Science
- Sensor Technology
Background:
- High-temperature environments pose significant challenges for conventional vibration sensors.
- The need for robust sensing solutions in extreme conditions, such as in aerospace and industrial processes, is critical.
Purpose of the Study:
- To propose and characterize a novel fiber-optic Fabry-Perot (F-P) vibration sensor capable of operating at temperatures up to 800 °C.
- To evaluate the sensor's sensitivity, resonant frequency, and nonlinear error across a wide temperature range.
Main Methods:
- Fabrication of the F-P interferometer using ultraviolet-laser ablation and three-layer direct-bonding technology.
- Theoretical calculation of sensor sensitivity and resonant frequency.
- Experimental characterization of sensor performance, including sensitivity, nonlinearity, and axis-dependent response at various temperatures.
Main Results:
- The sensor achieved a sensitivity of 0.876 nm/g at 20 °C, closely matching the theoretical value.
- Nonlinear error was maintained below 0.87% from 20 °C to 800 °C.
- The sensor exhibited significantly higher sensitivity along the z-axis compared to the x and y axes.
Conclusions:
- The developed fiber-optic F-P vibration sensor is suitable for high-temperature applications.
- The sensor demonstrates high sensitivity, low nonlinearity, and directional selectivity.
- This technology holds promise for advanced engineering applications in extreme thermal environments.

