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Updated: Jul 23, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Mingxuan Hu1,2, Yajun Pang1,2, Long Gao3
1Center for Advanced Laser Technology, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China.
Silicon-based Lidar offers solid-state beam steering, reducing device size and cost. This review covers silicon-based optical phased array, optical switch array, and frequency-modulated wave Lidar technologies.
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