Morphological, mechanical and antibacterial properties of Ti-Cu-N thin films deposited by sputtering DC

Ihwanul Aziz1,2, Emy Mulyani2, Yusril Yusuf1

  • 1Department of Physics, Faculty of Mathematics and Natural Science, Universitas Gadjah Mada, Yogyakarta, Indonesia.

Heliyon
|July 24, 2023
PubMed

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