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Related Concept Videos

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Single Molecule Fluorescence Microscopy on Planar Supported Bilayers
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CMOS Image Sensor for Broad Spectral Range with >90% Quantum Efficiency.

Olli E Setälä1, Martin J Prest2, Konstantin D Stefanov2

  • 1Department of Electronics and Nanoengineering, Aalto University, Tietotie 3, Espoo, FI-02150, Finland.

Small (Weinheim an Der Bergstrasse, Germany)
|July 26, 2023
PubMed
Summary
This summary is machine-generated.

Surface nanoengineering enhances complementary metal-oxide-semiconductor (CMOS) image sensors (CIS) by improving spectral range and photosensitivity. This novel approach reduces dark current, offering a promising alternative to conventional performance-limiting methods.

Keywords:
antireflection coatingblack siliconcomplementary metal-oxide-semiconductor (CMOS) image sensorsdark currentquantum efficiency

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Optoelectronics

Background:

  • Complementary metal-oxide-semiconductor (CMOS) image sensors (CIS) are vital in modern technology.
  • Conventional methods like antireflective coatings limit CIS performance by causing optical and electrical losses.

Purpose of the Study:

  • To investigate the impact of surface nanoengineering on CIS performance.
  • To replace traditional methods with nanostructured surfaces and atomic layer deposition for enhanced device capabilities.

Main Methods:

  • Applied surface nanoengineering, including nanostructured surfaces and atomic layer deposited passivation.
  • Utilized a commercial backside illuminated CIS for testing.
  • Evaluated spectral range, photosensitivity, dark current, and photoresponse uniformity.

Main Results:

  • Achieved >90% quantum efficiency across the 300-700 nm wavelength range.
  • Reduced dark current by a factor of three.
  • Observed slightly improved photoresponse uniformity, with a note on potential optical crosstalk due to nanostructures.

Conclusions:

  • Surface nanoengineering significantly enhances CIS spectral range and photosensitivity.
  • This technique offers a superior alternative to conventional methods for improving CIS performance.
  • Surface nanoengineering holds vast potential for diverse CIS applications.