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Related Experiment Video

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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
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Nondestructive initial-profile-free 3D elemental mapping in multilayer thin film structures based on EDX and a

Yutaka Hoshina1, Yugo Kubo1, Yojiro Nakayama1

  • 1Analysis Technology Research Center R&D Unit, Sumitomo Electric Industries, Ltd., 1-1-3 Shimaya, Konohana-ku, Osaka 554-0024, Japan.

Microscopy (Oxford, England)
|August 3, 2023
PubMed
Summary

Researchers developed a new method for nondestructive depth profiling using energy-dispersive X-ray spectroscopy (EDX) data. This technique enables 3D elemental mapping of multilayer thin films without prior profile assumptions, offering a significant advancement in materials analysis.

Keywords:
3DEDXdepth profileinitial-profile-freemappingnondestructive

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Spectroscopy

Background:

  • Nondestructive analysis of multilayer thin films is crucial for material characterization.
  • Existing methods often require sample destruction or make assumptions about initial profiles.
  • Accurate elemental distribution mapping is essential for understanding material properties.

Purpose of the Study:

  • To present a novel data analysis method for nondestructive depth profiling of multilayer thin films.
  • To enable three-dimensional elemental mapping from energy-dispersive X-ray spectroscopy (EDX) data without initial profile assumptions.
  • To validate the accuracy and utility of the proposed method through experimental analysis.

Main Methods:

  • Developed a data analysis method based on a quadratic programming problem.
  • Applied the method to perform depth profiling for all pixels in EDX 2D mapping data.
  • Validated results by comparing with cross-sectional observations of multilayer samples.

Main Results:

  • Successfully performed nondestructive depth profiling on two multilayer thin-film samples with different structures.
  • Demonstrated accurate three-dimensional elemental mapping of the samples.
  • Achieved wide-area (mm scale) elemental distribution analysis, surpassing limitations of other methods.

Conclusions:

  • The proposed method provides accurate, nondestructive depth profiling and 3D elemental mapping of multilayer thin films.
  • This technique overcomes the limitations of existing analytical methods for large-area, non-destructive analysis.
  • The paper fully describes the determination of critical hyperparameters for reliable results.