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Revealing Dominant Oxidative Species in Reactive Oxygen Species-Driven Rapid Chemical Etching

Mao Ye1, Tao Xu1, Min Liu1

  • 1SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China.

Nano Letters
|August 3, 2023
PubMed

Keywords:
Prussian bluehydroxyl radicalin situ liquid cell TEMrapid chemical etchingreactive oxygen species

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