Specimen plane orientation determination for analysis based on scanning electron microscope: Comparing top-down and...

Area of Science:

• Materials Science
• Microscopy Techniques
• Surface Analysis

Background:

• Scanning Electron Microscopes (SEM) are crucial for microscale analysis.
• Attachments like energy dispersive x-ray spectroscopy enhance SEM capabilities.
• Precisely orienting specimens with planar surfaces is essential for these attachments but challenging.

Purpose of the Study:

• To develop and validate in-situ methods for determining microscale specimen planar surface orientation within an SEM.
• To enable accurate specimen manipulation for advanced SEM analyses.

Main Methods:

• Proposed and tested top-down and side-view approaches for in-situ orientation determination.
• Top-down method: Maximizing projected area by adjusting stage rotation and tilt.
• Side-view method: Adjusting stage for a linear projection on SEM images.

Main Results:

• Successfully determined planar surface orientations using both proposed methods.
• Measured angles between surfaces showed high consistency with crystallographic expectations.
• Top-down approach achieved accuracy within 2.7°, side-view within 1.7°.

Conclusions:

• The developed top-down and side-view methods provide effective in-situ solutions for specimen orientation in SEM.
• These techniques facilitate the use of advanced SEM attachments requiring specific specimen orientations.
• Accurate orientation determination is crucial for detailed microstructural and crystallographic analysis.