Efficient Thermal-Stress Coupling Design of Chiplet-Based System with Coaxial TSV Array.

Xianglong Wang1, Jiaming Su1, Dongdong Chen1

  • 1School of Microelectronics, Xidian University, Xi'an 710071, China.

Micromachines
|August 26, 2023
PubMed
Summary

This study introduces an efficient design method for Chiplet systems using coaxial through silicon via (CTSV) arrays. The approach optimizes thermal-stress coupling for high-performance interconnect structures.

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