Design of a Ka-Band Five-Bit MEMS Delay with a Coplanar Waveguide Loaded U-Shaped Slit

This paper designs a five-bit microelectromechanical system (MEMS) time delay consisting of a single-pole six-throw (SP6T) RF switch and a coplanar waveguide (CPW) microstrip line. The focus is on the switch upper electrode design, power divider design, transmission line corner compensation structure design, CPW loading U-shaped slit structure design, and system simulation. The switch adopts a triangular upper electrode structure to reduce the cantilever beam equivalent elastic coefficient and the closed contact area to achieve low drive voltage and high isolation. The SP6T RF MEMS switch uses a disc-type power divider to achieve consistent RF performance across the output ports. When designed by loading U-shaped slit on transmission lines and step-compensated tangents at corners, the system loss is reduced, and the delay amount is improved. In addition, the overall size of the device is 2.1 mm × 2.4 mm × 0.5 mm, simulation results show that the device has a delay amount of 0-60 ps in the frequency range of 26.5-40 GHz, the delay accuracy at the center frequency is better than 0.63 ps, the delay error in the whole frequency band is less than 22.2%, the maximum insertion loss is 3.69 dB, and the input-output return rejection is better than 21.54 dB.