Related Experiment Video
Updated: Jul 18, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer
Guowen Liu1,2, Yu Liu2, Zhaohan Li2
1School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310058, China.
Abstract:
This article describes a closed-loop detection MEMS accelerometer for acceleration measurement. This paper analyzes the working principle of MEMS accelerometers in detail and explains the relationship between the accelerometer zero bias, scale factor and voltage reference. Therefore, a combined compensation method is designed via reference voltage source compensation and terminal temperature compensation of the accelerometer, which comprehensively improves the performance over a wide temperature range of the accelerometer. The experiment results show that the initial range is reduced from 3679 ppm to 221 ppm with reference voltage source compensation, zero-bias stability of the accelerometer over temperature is increased by 14.3% on average and the scale factor stability over temperature is increased by 88.2% on average. After combined compensation, one accelerometer zero-bias stability over temperature was reduced to 40 μg and the scale factor stability over temperature was reduced to 16 ppm, the average value of the zero-bias stability over temperature was reduced from 1764 μg to 36 μg, the average value of the scale factor stability over temperature was reduced from 2270 ppm to 25 ppm, the average stability of the zero bias was increased by 97.96% and the average stability of the scale factor was increased by 98.90%.
More Related Videos
11:44Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
06:33Method for Simultaneous fMRI/EEG Data Collection during a Focused Attention Suggestion for Differential Thermal Sensation
Published on: January 5, 2014
Related Concept Videos
Equivalent Capacitance
The following strategies are adopted to calculate...
Design Example: Capacitance Multiplier Circuit
The circuit illustrated in Figure 1 below incorporates two op-amps, with the first operating as a voltage follower and the second acting as an inverting amplifier.
Spherical and Cylindrical Capacitor
Conventionally, considering the symmetry, the electric field between the concentric shells of a spherical capacitor is directed radially outward. The magnitude of the field,...
Mesh Analysis for AC Circuits
The process of harmonizing these impedances begins with a clear understanding of the input and output signals. Once these signals are known, the...
Distance Corrections
Constant Pressure Calorimetry