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Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer.

Guowen Liu1,2, Yu Liu2, Zhaohan Li2

  • 1School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310058, China.

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Summary
This summary is machine-generated.

This study introduces a closed-loop Micro-Electro-Mechanical Systems (MEMS) accelerometer. A novel compensation method significantly enhances accelerometer performance and stability across wide temperature ranges.

Keywords:
MEMS accelerometercombined compensationtemperature compensationvoltage reference

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Area of Science:

  • Instrumentation and Measurement
  • Micro-Electro-Mechanical Systems (MEMS)
  • Sensor Technology

Background:

  • MEMS accelerometers are crucial for acceleration measurement.
  • Performance limitations include zero bias and scale factor drift, especially over temperature variations.
  • Existing compensation methods may not fully address these challenges.

Purpose of the Study:

  • To describe a closed-loop detection MEMS accelerometer.
  • To analyze the working principles and performance dependencies of MEMS accelerometers.
  • To develop and validate a combined compensation method for improved performance and stability.

Main Methods:

  • Detailed analysis of MEMS accelerometer working principles.
  • Investigation of the relationship between zero bias, scale factor, and voltage reference.
  • Implementation of a combined compensation strategy using reference voltage source and terminal temperature compensation.

Main Results:

  • Reference voltage source compensation reduced the initial range from 3679 ppm to 221 ppm.
  • Zero-bias stability increased by 14.3% and scale factor stability by 88.2% on average after initial compensation.
  • Combined compensation reduced zero-bias stability to 40 μg and scale factor stability to 16 ppm in one device, with average improvements of 97.96% and 98.90% respectively.

Conclusions:

  • The developed combined compensation method effectively improves MEMS accelerometer performance over wide temperature ranges.
  • The approach significantly reduces zero bias and scale factor drift, enhancing measurement accuracy and reliability.
  • This work contributes to the advancement of high-performance MEMS accelerometer technology.