Related Experiment Video
Updated: Jul 17, 2025
10:58
Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
10.2K
Integration of microbattery with thin-film electronics for constructing an integrated transparent microsystem based
Bin Jia1, Chao Zhang1, Min Liu1
1Key Laboratory of MEMS of the Ministry of Education, School of Integrated Circuits, Southeast University, Nanjing, 210096, China.
Nature Communications
|September 1, 2023
Summary
Researchers integrated transparent energy, electronic, and sensing devices using Indium Gallium Zinc Oxide (InGaZnO). This monolithic microsystem demonstrates collaborative functions, advancing transparent electronics capabilities.
Area of Science:
- Materials Science
- Electronics Engineering
- Energy Storage
Background:
- Transparent electronics require integrated power, logic, and sensing functionalities.
- Indium Gallium Zinc Oxide (InGaZnO) offers multifunctional properties suitable for transparent device fabrication.
Purpose of the Study:
- To develop a monolithic integrated transparent microsystem combining energy storage, thin-film transistors, and photodetectors.
- To utilize the multifunctional properties of InGaZnO for fabricating all components of the transparent microsystem.
Main Methods:
- Fabrication of a transparent lithium-ion battery using InGaZnO as the anode.
- Development of an InGaZnO-based thin-film transistor for logic operations.
- Creation of an InGaZnO-based photodetector for light sensing.
- Integration of these devices into a single monolithic transparent microsystem.
Main Results:
- The transparent lithium-ion battery achieved a capacity of approximately 9.8 μAh cm⁻².
- The InGaZnO thin-film transistor exhibited a mobility of 23.3 cm² V⁻¹ s⁻¹.
- The InGaZnO photodetector demonstrated a responsivity of 0.35 A/W.
- Successful demonstration of on-chip AC signal charging via the thin-film transistor rectifier and photodetector operation powered by the integrated battery.
Conclusions:
- A fully integrated transparent microsystem was successfully constructed using InGaZnO.
- The microsystem exhibits collaborative functions between its energy, electronic, and sensing components.
- This work advances the development of multifunctional transparent electronic systems.
