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Low-coherence optical profilometry with multi-reflection reference mirrors for large-depth object measurement.

Quang Duc Pham, Yoshio Hayasaki

|September 14, 2023

Summary

This summary is machine-generated.

This study introduces a novel optical setup for digital holographic profilometry, enhancing surface measurement range for large objects. The new system achieves double the measurement depth without losing accuracy, improving flexibility and fringe visibility.

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Area of Science:

Optics and Photonics
Metrology
Surface Science

Background:

Digital holographic profilometry is crucial for precise surface measurements.
Measuring large-depth objects presents challenges in extending the axial range.
Existing methods may suffer from reduced spatial resolution or accuracy when increasing measurement depth.

Purpose of the Study:

To propose a new optical configuration for digital holographic profilometry.
To extend the maximum axial measurable range for large-depth objects.
To maintain or improve spatial resolution and measurement accuracy.

Main Methods:

Utilizing a novel optical configuration with two multi-reflection mirrors.
Adjusting the distance and position of the multi-reflection reference mirrors.
Employing digital holographic principles for surface profile reconstruction.

Main Results:

The proposed configuration extends the maximum axial measurable range by a factor of 2.
Spatial resolution is maintained without degradation.
Increased visibility of interference fringes leads to high-accuracy object profile measurement.
The system offers enhanced flexibility for measuring diverse object parts.

Conclusions:

The novel optical configuration effectively enhances the axial measurement range in digital holographic profilometry.
The system provides a flexible and accurate solution for surface profile measurement of large-depth objects.
This advancement contributes to improved metrology capabilities for complex surfaces.