Optical measurements of the silicon vacuum window with anti-reflective sub-wavelength structure for ASTE Band 10

For millimeter and submillimeter-wave astronomy, it is highly desirable to have vacuum windows within the receiver cryostat that exhibit low reflection, low loss, and a wide bandpass. The use of antireflective (AR) sub-wavelength structures (SWSs) on substrates has expanded the possibilities for creating new vacuum windows. Recently, a novel method of fabricating AR SWS on a silicon-on-insulator wafer has been proposed, and a vacuum window with a two-layer AR SWS has been developed for use with the Atacama Submillimeter Telescope Experiment Band 10 receiver. To thoroughly assess the characteristics of the silicon window sample, we conducted transmittance measurements using terahertz time-domain spectroscopy, and noise and beam measurements using an Atacama Large Millimeter/submillimeter Array (ALMA) Band 10 receiver. We found that the silicon window sample exhibits characteristics comparable to the quartz window of the ALMA Band 10 receiver. The result strongly encourages applications of AR silicon windows in receivers with wider bandwidths.