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Summary

This study presents a Nomarski differential interference method to measure surface profiles, even with varying reflectivity. The technique accurately measures micromechanics and microsystems elements.

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Area of Science:

Optical Metrology
Surface Characterization
Microscopy

Background:

Accurate surface profiling is crucial for micromechanics and microsystems.
Existing methods may struggle with samples exhibiting non-uniform reflectivity.
Differential interference contrast microscopy offers potential for enhanced surface analysis.

Purpose of the Study:

To develop and validate a Nomarski differential interference method for measuring surface profiles.
To account for polarization effects in optical systems, including non-polarizing beam splitters.
To enable accurate surface profile determination from interference intensity, even with variable sample reflectivity.

Main Methods:

Utilized Nomarski differential interference microscopy.
Employed Jones's matrices for system analysis, incorporating polarization effects.
Developed equations to derive surface profiles from interference intensity data.
Verified the method by measuring an adhered silicon cantilever on a high-reflectivity substrate.

Main Results:

Successfully demonstrated a method for measuring surface profiles with reflection variations.
Validated the accuracy and reliability of the developed measurement approach.
Quantified the impact of polarization effects on the measurement system.

Conclusions:

The presented Nomarski differential interference method is effective for surface profiling with non-uniform reflectivity.
This technique provides a valuable tool for inspecting micromechanics and microsystems.
The incorporation of Jones's matrices and polarization analysis enhances measurement accuracy.