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Design and implementation of a real-time compensation algorithm for nonlinear error based on ellipse fitting.

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    This study enhances interferometer displacement measurement accuracy by identifying and compensating for nonlinear errors from lasers and polarizing beam splitters (PBS). Compensation strategies reduced peak-to-peak nonlinear error from 11.62 nm to 5.37 nm.

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    Area of Science:

    • Metrology and Measurement Science
    • Optical Engineering
    • Laser Interferometry

    Background:

    • Interferometer displacement measurement systems are crucial for precision engineering.
    • Nonlinear errors in interferometers limit measurement accuracy.
    • Sources of error include laser instability and polarizing beam splitter (PBS) imperfections.

    Purpose of the Study:

    • To identify and model nonlinear error sources in interferometer systems.
    • To develop effective compensation strategies for improved measurement accuracy.
    • To validate the proposed compensation methods through experimental analysis.

    Main Methods:

    • Modeling nonlinear errors attributed to the laser and PBS.
    • Applying dual orthogonal lock-in amplification for frequency and amplitude error compensation.
    • Implementing a real-time ellipse fitting algorithm for PBS-induced errors and amplitude uncertainty.

    Main Results:

    • Successfully modeled nonlinear errors in the interferometer system.
    • Separated and compensated for frequency uncertainty and amplitude errors using lock-in amplification.
    • Reduced the peak-to-peak nonlinear error from 11.62 nm to 5.37 nm.
    • Validated the effectiveness of the real-time ellipse fitting compensation algorithm.

    Conclusions:

    • The developed compensation strategies significantly improve interferometer displacement measurement accuracy.
    • The combination of lock-in amplification and ellipse fitting effectively addresses nonlinear errors.
    • This research offers a practical solution for enhancing precision in optical metrology.