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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Gallium arsenide optical phased array photonic integrated circuit.

Michael Nickerson, Bowen Song, Jim Brookhyser

    Optics Express
    |September 15, 2023
    PubMed
    Summary

    Researchers developed a 16-channel optical phased array on a gallium arsenide platform. This photonic integrated circuit achieves precise beam steering with a narrow beamwidth and wide steering range, enabling advanced optical applications.

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    Area of Science:

    • Photonics
    • Integrated Optics
    • Semiconductor Devices

    Background:

    • Optical phased arrays (OPAs) are crucial for beam steering applications.
    • Gallium arsenide (GaAs) is a key material for high-performance photonic integrated circuits.
    • Low-complexity fabrication processes are essential for scalable OPA production.

    Purpose of the Study:

    • To fabricate and characterize a 16-channel optical phased array on a GaAs photonic integrated circuit.
    • To evaluate the performance of phase modulators within the array.
    • To demonstrate a low-complexity fabrication approach for OPAs.

    Main Methods:

    • Fabrication of a 16-channel OPA using a low-complexity process on a GaAs platform.
    • Testing the OPA with a 1064 nm external laser source.
    • Characterization of phase modulator performance, including electro-optical bandwidth and modulation efficiency.

    Main Results:

    • Achieved a 0.92° beamwidth and a 15.3° grating-lobe-free steering range.
    • Demonstrated a sidelobe level of 12 dB.
    • Phase modulators exhibited DC power consumption < 5 µW and bandwidth > 770 MHz.
    • Modulation efficiency (Vπ·L) ranged from 0.5 V·cm to 1.22 V·cm across tested wavelengths (980–1360 nm).

    Conclusions:

    • The developed GaAs OPA demonstrates excellent beam steering capabilities with a low-complexity fabrication process.
    • The integrated phase modulators offer high performance in terms of power consumption, bandwidth, and modulation efficiency.
    • This work paves the way for efficient and scalable optical phased array systems.