Fast and Uncooled Semiconducting Ca-Doped Y-Ba-Cu-O Thin Film-Based Thermal Sensors for Infrared

YBa₂Cu₃O_6+x (YBCO) cuprates are semiconductive when oxygen depleted (x < 0.5). They can be used for uncooled thermal detection in the near-infrared: (i) low temperature deposition on silicon substrates, leading to an amorphous phase (a-YBCO); (ii) pyroelectric properties exploited in thermal detectors offering both low noise and fast response above 1 MHz. However, a-YBCO films exhibit a small direct current (DC) electrical conductivity, with strong non-linearity of current-voltage plots. Calcium doping is well known for improving the transport properties of oxygen-rich YBCO films (x > 0.7). In this paper, we consider the performances of pyroelectric detectors made from calcium-doped (10 at. %) and undoped a-YBCO films. First, the surface microstructure, composition, and DC electrical properties of a-Y_0.9Ca_0.1Ba₂Cu₃O_6+x films were investigated; then devices were tested at 850 nm wavelength and results were analyzed with an analytical model. A lower DC conductivity was measured for the calcium-doped material, which exhibited a slightly rougher surface, with copper-rich precipitates. The calcium-doped device exhibited a higher specific detectivity (D*=7.5×107 cm·Hz/W at 100 kHz) than the undoped device. Moreover, a shorter thermal time constant (<8 ns) was inferred as compared to the undoped device and commercially available pyroelectric sensors, thus paving the way to significant improvements for fast infrared imaging applications.