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Thermoelectric transport properties of Si, SiGe, and silicide CMOS-compatible thin films

Caroline Schwinge1, Raik Hoffmann1, Johannes Hertel1

  • 1Fraunhofer Institute for Photonic Microsystems IPMS, An der Bartlake 5, 01109 Dresden, Germany.

The Review of Scientific Instruments
|October 4, 2023
PubMed

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