Characterization of an Impedance-Type Humidity Sensor Based on Porous SnO₂/TiO₂ Composite Ceramics Modified with...

In this study, we report on the room-temperature characteristics of an impedance-type humidity sensor based on porous tin oxide/titanium oxide (SnO₂/TiO₂) composite ceramics modified with Mo and Zn. The SnO₂/TiO₂-based composites synthesized in the solid-state processing technique have been structurally characterized using X-ray diffraction, scanning electron microscopy, energy dispersive, and Raman spectroscopy. Structural analysis indicated the desired porous nature of the synthesized ceramics for sensing applications, with an average crystallite size in the nano range and a density of about 80%. The humidity-sensing properties were evaluated within a wide relative humidity range from 15% to 85% at room temperature, and the results showed that a better humidity response had a sample with Mo. This humidity-sensing material exhibits a linear impedance change of about two orders of magnitude at the optimal operating frequency of 10 kHz. Furthermore, fast response (18 s) and recovery (27 s), relatively small hysteresis (2.8%), repeatability, and good long-term stability were also obtained. Finally, the possible humidity-sensing mechanism was discussed in detail using the results of complex impedance analysis.