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Updated: Jul 13, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation
Romolo Marcelli1, Giovanni Maria Sardi1, Emanuela Proietti1
1Institute for Microelectronics and Microsystems (CNR-IMM), 00133 Roma, Italy.
Abstract:
Triangular resonators re-shaped into Sierpinski geometry and U-shaped resonators were designed, linking them with single-pole-double-through (SPDT) RF MEMS switches to provide frequency tuning for potential applications in the K-Band. Prototypes of band-stop narrowband filters working around 20 GHz and 26 GHz, interesting for RADAR and satellite communications, were studied in a coplanar waveguide (CPW) configuration, and the tuning was obtained by switching between two paths of the devices loaded with different resonators. As a result, dual-band operation or fine-tuning could be obtained depending on the choice of the resonator, acting as a building block. The studied filters belong to the more general group of devices inspired by a metamaterial design.
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