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Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation01:26

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Inductively coupled plasma (ICP) is the common plasma source used in atomic emission spectroscopy (AES), a technique that detects and analyzes various elements in a sample. This method is often called inductively coupled plasma atomic emission spectroscopy (ICP-AES).
There are three main types of inductively coupled plasma atomic emission spectroscopy  (ICP-AES) instruments: sequential, simultaneous multichannel, and Fourier transform instruments, with the latter being less commonly used....
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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Small-angle measurement system enhanced by an optical phased array.

Qiqi Wang, Junhe Zhou

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    Summary
    This summary is machine-generated.

    This study introduces a novel small-angle measurement system using an optical phased array (OPA) to significantly expand the measurement range. The OPA enhances detection capabilities, achieving a fivefold increase in range without compromising accuracy.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Photonics

    Background:

    • Small-angle measurement systems often face limitations in their maximum detectable angle.
    • Existing methods using reflective sectors are constrained by detector aperture size.

    Purpose of the Study:

    • To propose and demonstrate a novel small-angle measurement system with an enhanced measurement range.
    • To overcome the limitations of detector aperture size in small-angle metrology.

    Main Methods:

    • Integration of an optical phased array (OPA) onto a spatial light modulator (SLM).
    • Utilizing the OPA to enlarge the effective measurement range of the laser beam.
    • Experimental verification of the system's performance and accuracy.

    Main Results:

    • The proposed system demonstrates a significantly wider measurement range compared to conventional methods.
    • A proof-of-concept experiment showed at least a fivefold increase in measurement range.
    • Measurement accuracy was maintained at the same level as systems without the OPA.

    Conclusions:

    • The OPA-enhanced small-angle measurement system effectively increases the measurement range.
    • This novel approach offers a viable solution for applications requiring precise small-angle detection over extended ranges.
    • The system provides a wider measurement range with unaffected accuracy, proving its practical utility.