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Line spectroscopic reflectometry for rapid and large-area thickness measurement
Optics Express
|October 20, 2023
Summary
Line spectroscopic reflectometry (LSR) enables rapid, large-area thickness measurement of transparent layers. This new method measures 2048 points simultaneously, significantly increasing speed for manufacturing applications.
Area of Science:
- Materials Science
- Optical Metrology
- Manufacturing Technology
Background:
- Accurate thickness measurement of optically transparent layers (0.1-1 mm) is critical for manufacturing.
- Current non-contact methods are limited to single-point or few-point measurements, hindering inline area analysis.
Purpose of the Study:
- To introduce Line Spectroscopic Reflectometry (LSR) for rapid, large-area, non-contact thickness measurements.
- To demonstrate the capability of LSR for inline manufacturing process monitoring.
Main Methods:
- Developed LSR by combining line beam illumination and line spectroscopy for simultaneous multi-point measurements.
- Utilized near-infrared optics for thickness profiling over a 68 mm measurement line.
- Implemented 1D sample scanning to achieve area measurement.
Main Results:
- LSR measures 2048 points concurrently, achieving a two-thousand-fold increase in measurement speed.
- Successfully demonstrated thickness measurements for single- and double-layered samples.
- Inline area measurement rates were limited only by camera readout speed.
Conclusions:
- LSR offers a significant advancement for non-contact, large-area thickness metrology in manufacturing.
- The high-speed, multi-point measurement capability of LSR addresses limitations of traditional methods.
- LSR is suitable for inline quality control and process monitoring of transparent layers.
