Rapid Electrohydrodynamic-Driven Pattern Replication over a Large Area via Ultrahigh Voltage Pulses

Hyunje Park1, Jaeseok Hwang2, Jaejong Lee3

  • 1Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea.

ACS Nano
|November 8, 2023
PubMed
Summary

This study introduces an ultrahigh electric field electrohydrodynamic instability patterning (EHIP) method for rapid, uniform large-scale nanopatterning. The advanced EHIP process enhances pattern quality and overcomes previous limitations in pattern replication.