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Updated: May 5, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Heejoon Chae1, Hyunje Park2, Dae Joon Kang1
1Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon-si 16419, Gyeonggi-do, Republic of Korea.
This review provides a framework for evaluating lithographic techniques based on manufacturing metrics like throughput and defectivity. It connects innovation to system-level constraints for practical guidance in nanolithography.
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