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Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

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Published on: June 7, 2019

Hybrid Metrology for Nanostructured Optical Metasurfaces.

Irdi Murataj^1,2, Angelo Angelini¹, Eleonora Cara¹

¹Advanced Materials and Life Science Division, Istituto Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy.

ACS Applied Materials & Interfaces

|November 22, 2023

Summary

This summary is machine-generated.

This study introduces a new hybrid metrology method using X-ray techniques to precisely measure the refractive index of nanoscale dielectric materials. This advances the manufacturing of functional metasurfaces with tailored optical properties.

Keywords:

Block Copolymers Grazing Incidence Small Angle X-ray Scattering Grazing Incidence X-ray Fluorescence Sequential Infiltration Synthesis Synchrotron Radiation

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Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures

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Published on: November 21, 2019

Area of Science:

Nanotechnology
Materials Science
Optics

Background:

Metasurfaces offer miniaturization and novel functionalities over traditional optical elements.
Advancements enable nanometer-scale metasurfaces for visible wavelengths, but large-scale manufacturing faces challenges.
Precise characterization of dielectric nanostructures' refractive index is crucial but lacking.

Purpose of the Study:

To develop and validate a hybrid metrology strategy for nanoscale refractive index determination.
To enable precise material characterization for fabricating functional metasurfaces.
To correlate material properties with optical functionality.

Main Methods:

Integration of complementary synchrotron-based traceable X-ray techniques.
Fabrication of TiO2 nanostructures using block copolymer (BCP) self-assembly and sequential infiltration synthesis (SIS).
Utilizing physical models to integrate synchrotron data and validate laboratory measurements.

Main Results:

Demonstrated a hybrid metrology approach for comprehensive nanoscale material characterization.
Successfully fabricated TiO2 nanostructures with controlled dimensions and composition.
Established a validation scheme for determining effective refractive indices of nanoscale dielectric materials.

Conclusions:

The hybrid metrology strategy provides precise and reliable refractive index determination for dielectric nanostructures.
This approach supports the development of large-scale manufacturing for customizable metasurfaces.
Accurate metrology is essential for correlating material properties with optical performance in nanophotonics.