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Quantitative Field Emission Imaging for Studying the Doping-Dependent Emission Behavior of Silicon Field Emitter

Andreas Schels1, Florian Herdl1, Matthias Hausladen2

  • 1Faculty of Electrical Engineering and Information Technology, University of the Bundeswehr Munich, 85577 Neubiberg, Germany.

Micromachines
|November 25, 2023
PubMed

Keywords:
doping dependentfield emissionfield emission imagingfield-emitter arraysp-type siliconsilicon field-emitter array

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