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An Ultraviolet-Lithography-Assisted Sintering Method for Glass Microlens Array Fabrication.

Fangyuan Zuo^1,2,3, Shenghua Ma^2,3,4, Wei Zhao^1,2,3

¹State Key Laboratory of Photon-Technology in Western China Energy, Xi'an 710127, China.

|November 25, 2023

Summary

A novel method for fabricating large-scale glass microlens arrays (MLAs) uses UV lithography and glass particle sintering. This technique offers a faster, scalable alternative to traditional laser-based fabrication for optical applications.

Keywords:

convex microlens arrays glass particle sintering ultraviolet lithography

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Area of Science:

Materials Science
Optics
Nanotechnology

Background:

Glass microlens arrays (MLAs) are crucial for optical communication, sensing, and imaging due to their optical properties and stability.
Current fabrication methods, like femtosecond laser etching, are slow and not scalable for large arrays.

Purpose of the Study:

To develop a new, scalable method for fabricating large-scale glass MLAs.
To overcome the limitations of time-consuming, point-by-point laser fabrication techniques.

Main Methods:

Utilized ultraviolet (UV) lithography to create micropillar arrays of glass particles on a quartz substrate.
Employed glass particle sintering, where molten glass self-assembles into convex microlenses via surface tension.
Optimized sintering parameters to eliminate bubbles and control focal length.

Main Results:

Successfully fabricated large-scale glass MLAs with controllable focal lengths ranging from 0.12 to 0.2 mm.
Demonstrated the self-assembly of convex microlenses through controlled sintering of glass particles.
Identified key factors influencing microlens focal length and array image performance.

Conclusions:

The proposed UV lithography-assisted glass particle sintering is an efficient and scalable method for producing glass MLAs.
This technique provides a viable alternative to existing methods for advanced optical applications.
Further studies confirmed the control over focal length and image quality.