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Large-aperture electromagnetically actuated MEMS Fabry-Perot filtering chips for visible spectral imaging
Optics Express
|November 29, 2023
Summary
Researchers developed a large-aperture micro-electro-mechanical-system-based Fabry-Perot filtering chip (MEMS-FPFC) for visible spectral imaging. This advancement enables miniaturized spectral imagers for diverse applications.
Area of Science:
- Optics and Photonics
- Micro-electro-mechanical Systems (MEMS)
Background:
- Micro-electro-mechanical-system-based Fabry-Perot filtering chips (MEMS-FPFCs) offer miniaturization potential for spectral imagers.
- Existing visible wavelength (VIS) MEMS-FPFCs have limited aperture sizes due to micromachining stress, hindering performance.
Purpose of the Study:
- To propose and develop a large-aperture, electromagnetically actuated MEMS-FPFC for visible spectral imaging.
- To overcome the limitations of small aperture sizes in current VIS MEMS-FPFCs.
Main Methods:
- Design utilizing a multi-field coupling simulation model.
- Development of a low-stress, wafer-scale bulk micromachining process.
- Strict control and allocation of film stress in a multi-layer film stack.
Main Results:
- Successful development of VIS MEMS-FPFCs with a 6 mm aperture size.
- Achieved bidirectional and continuous tuning in the 612-678 nm waveband.
- Demonstrated a linear response better than 95%.
Conclusions:
- The developed large-aperture VIS MEMS-FPFC is suitable for constructing miniaturized spectral imagers.
- Potential applications include intelligent agriculture, environmental protection, and industrial inspection.
- This technology addresses the need for high-performance VIS spectral imaging devices.
