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Improved dispersion-encoded full-range spectral interferometry for large depth, large inclination and rough samples.

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    This study introduces enhanced dispersion-encoded full-range spectral interferometry for accurate measurements of deep, inclined, and rough samples. The improved technique enhances phase compensation, extending depth measurement range and precision for complex surfaces.

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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Surface Profilometry

    Background:

    • Accurate measurement of samples with significant depth, inclination, and roughness is challenging due to low optical signal intensity and disturbance terms.
    • Existing spectral interferometry methods require precise phase compensation for reliable measurements of complex surfaces.

    Purpose of the Study:

    • To develop and validate an enhanced dispersion-encoded full-range spectral interferometry technique.
    • To improve measurement accuracy and range for samples with complex surface characteristics.

    Main Methods:

    • Implemented direct current removal by subtracting the interference spectrum envelope to identify weak signals near zero optical delay.
    • Preserved data with good phase continuity to mitigate spectrometer aberrations and enhance phase compensation accuracy.

    Main Results:

    • Extended the depth measurement range from 6 mm to 12 mm.
    • Achieved an axial measurement precision of 2.5µm.
    • Demonstrated superior adaptation to complex surfaces compared to laser line profilers through full-depth imaging of ceramic and 3D-printed samples.

    Conclusions:

    • The enhanced spectral interferometry technique significantly improves measurement accuracy and range for challenging samples.
    • The method offers robust performance on complex surfaces, outperforming traditional laser line profilers.