Role of oxygen vacancies in ferroelectric or resistive switching hafnium oxide

HfO₂ shows promise for emerging ferroelectric and resistive switching (RS) memory devices owing to its excellent electrical properties and compatibility with complementary metal oxide semiconductor technology based on mature fabrication processes such as atomic layer deposition. Oxygen vacancy (V_o), which is the most frequently observed intrinsic defect in HfO₂-based films, determines the physical/electrical properties and device performance. V_o influences the polymorphism and the resulting ferroelectric properties of HfO₂. Moreover, the switching speed and endurance of ferroelectric memories are strongly correlated to the V_o concentration and redistribution. They also strongly influence the device-to-device and cycle-to-cycle variability of integrated circuits based on ferroelectric memories. The concentration, migration, and agglomeration of V_o form the main mechanism behind the RS behavior observed in HfO₂, suggesting that the device performance and reliability in terms of the operating voltage, switching speed, on/off ratio, analog conductance modulation, endurance, and retention are sensitive to V_o. Therefore, the mechanism of V_o formation and its effects on the chemical, physical, and electrical properties in ferroelectric and RS HfO₂ should be understood. This study comprehensively reviews the literature on V_o in HfO₂ from the formation and influencing mechanism to material properties and device performance. This review contributes to the synergetic advances of current knowledge and technology in emerging HfO₂-based semiconductor devices.